Image Gallery ⠀ GaN (10 um x 10 um)GaN (5 um x 5 um)GaN (2 um x 2 um))AlN on SiCAlN on sapphireAlGaNAlGaNAlGaNEpitaxial wafersTGZ1TGZ2TGQ1TGG1SiC 0.75 nm2D200-XYHS-100MGPS-LDPEGold layer (111)Patterned test waferHOPGWCN filmCopper dishing ⠀