Business Area
Semiconductor Metrology & Inspection (MI)
Atomic-level ultra-high resolution analysis
We perform precision analysis of surface characteristics for memory and system semiconductors at the atomic level, delivering high-fidelity 3D data.
Next-generation inline measurement solutions
We provide non-destructive 3D inline metrology solutions applicable to both Front-End (FE) and Back-End (BE) processes,based on Critical Dimension (CD) measurement and nanoscale surface analysis.
1) Semiconductor & Electronics
We provide high-precision surface and dimensional metrology for semiconductor wafers, devices, and micro- and nanoscale structures.
Our solutions support process R&D, device inspection, defect analysis, and advanced semiconductor manufacturing development.
2) Research Institutes & Universities
We support fundamental and applied research across nanotechnology, materials science, physics, and engineering.
High-resolution characterization enables detailed investigation of nanoscale structures, surface phenomena, and emerging materials.
3) Advanced Materials & Precision Engineering
We enable precise evaluation of surface morphology, nanostructures, and ultra-precision surfaces.
Our measurement solutions support the development and optimization of advanced materials, functional surfaces, precision components, and next-generation manufacturing technologies.
4) Biomedical & Pharmaceutical
We support nanoscale characterization for biomedical research, medical diagnostics, pharmaceutical development, and nano-bio applications.
Our technology enables detailed investigation of biological materials, surface interactions, and micro- and nanoscale structures relevant to life science research.