Jheus-X

Scalable QTF-AFM Platform for Advanced Metrology (Jheus-X_Click here for details)

Additional XYθ Wafer Positioning Stage

• Full 8-inch/12-inch Wafer Coverage
• Full-Wafer Site Access
• High-Precision Closed-Loop Positioning

Premium Dual-Head System

• Two Fully Independent QTF-AFM Heads
• Fully Independent Parallel FPGA-Based Control
• Simultaneous Measurement

For more detailed specifications, please contact us.