Scalable QTF-AFM Platform for Advanced Metrology (Jheus-X_Click here for details)
Additional XYθ Wafer Positioning Stage
Full 8-inch/12-inch Wafer Coverage
Full-Wafer Site Access
High-Precision Closed-Loop Positioning
Premium Dual-Head System
Two Fully Independent QTF-AFM Heads
Fully Independent Parallel FPGA-Based Control
Simultaneous Measurement
For more detailed specifications, please contact us.